Chip Annealing Furnace
Heat treatment, also known as annealing, is a common step in the semiconductor manufacturing process. The accumulation of localized charges caused by radiation within semiconductors and insulators alters the local field distribution, threshold voltage, and leakage current. Vicorv is developing a patented technology that directly implements system-level annealing processes on the chip itself. By performing heat treatment in the laboratory, this technique aims to anneal defects and enhance device performance.